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2D Geometrical Parameters of Asymmetric Plasmonic Crescent-Shaped Nanostructures Fabricated with Colloidal Nanolithography.

Authors :
Kudrya, V. P.
Source :
Russian Microelectronics. 2023 Suppl 1, Vol. 52, pS110-S114. 5p.
Publication Year :
2023

Abstract

A 2D geometric analysis of the thin-film crescent-shaped nanostructure array fabrication process based on colloidal lithography was carried out. Calculation formulas are given that allow, at given angles of evaporation (generally, deposition) of a thin metal film through a mask formed by nanospheres deposited on the substrate surface, and its subsequent sputtering (normal or oblique) through the same mask, to find the 2D boundaries of the resulting crescent-shaped nanostructures. The analytical and numerical results obtained make it possible to optimize the specified angles to obtain an array of the thin-film crescent-shaped nanostructures with the required geometric parameters, such as the crescent tip angles and/or the crescent width. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
10637397
Volume :
52
Database :
Academic Search Index
Journal :
Russian Microelectronics
Publication Type :
Academic Journal
Accession number :
176220987
Full Text :
https://doi.org/10.1134/S1063739723600115