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2D Geometrical Parameters of Asymmetric Plasmonic Crescent-Shaped Nanostructures Fabricated with Colloidal Nanolithography.
- Source :
-
Russian Microelectronics . 2023 Suppl 1, Vol. 52, pS110-S114. 5p. - Publication Year :
- 2023
-
Abstract
- A 2D geometric analysis of the thin-film crescent-shaped nanostructure array fabrication process based on colloidal lithography was carried out. Calculation formulas are given that allow, at given angles of evaporation (generally, deposition) of a thin metal film through a mask formed by nanospheres deposited on the substrate surface, and its subsequent sputtering (normal or oblique) through the same mask, to find the 2D boundaries of the resulting crescent-shaped nanostructures. The analytical and numerical results obtained make it possible to optimize the specified angles to obtain an array of the thin-film crescent-shaped nanostructures with the required geometric parameters, such as the crescent tip angles and/or the crescent width. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10637397
- Volume :
- 52
- Database :
- Academic Search Index
- Journal :
- Russian Microelectronics
- Publication Type :
- Academic Journal
- Accession number :
- 176220987
- Full Text :
- https://doi.org/10.1134/S1063739723600115