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Regime Map of the Effective Medium Approximation Modelling of Micro-Rough Surfaces in Ellipsometry.
- Source :
-
Sensors (14248220) . Feb2024, Vol. 24 Issue 4, p1242. 12p. - Publication Year :
- 2024
-
Abstract
- In this work, we discuss the precision of the effective medium approximation (EMA) model in the data analysis of spectroscopic ellipsometry (SE) for solid materials with micro-rough surfaces by drawing the regime map. The SE parameters ψ (amplitude ratio) and Δ (phase difference) of the EMA model were solved by rigorous coupled-wave analysis. The electromagnetic response of the actual surfaces with micro roughness was simulated by the finite-difference time-domain method, which was validated by the experimental results. The regime maps associated with the SE parameters and optical constants n (refractive index) and k (extinction coefficient) of the EMA model were drawn by a comparison of the actual values with the model values. We find that using EMA to model micro-rough surfaces with high absorption can result in a higher precision of the amplitude ratio and extinction coefficient. The precisions of ψ, Δ, n and k increase as the relative roughness σ/λ (σ: the root mean square roughness, λ: the incident wavelength) decreases. The precision of ψ has an influence on the precision of k and the precision of Δ affects the precision of n. Changing σ alone has little effect on the regime maps of the relative errors of SE parameters and optical constants. A superior advantage of drawing the regime map is that it enables the clear determination as to whether EMA is able to model the rough surfaces or not. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 24
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Sensors (14248220)
- Publication Type :
- Academic Journal
- Accession number :
- 175649016
- Full Text :
- https://doi.org/10.3390/s24041242