Investigation of Coatings Formed by Thermal Oxidation on Monocrystalline Silicon.

MLA

Igamov, B. D., et al. “Investigation of Coatings Formed by Thermal Oxidation on Monocrystalline Silicon.” Integrated Ferroelectrics, vol. 240, no. 1, Jan. 2024, pp. 53–63. EBSCOhost, https://doi.org/10.1080/10584587.2023.2296317.

APA

Igamov, B. D., Imanova, G. T., Kamardin, A. I., & Bekpulatov, I. R. (2024). Investigation of Coatings Formed by Thermal Oxidation on Monocrystalline Silicon. Integrated Ferroelectrics, 240(1), 53–63. https://doi.org/10.1080/10584587.2023.2296317

Chicago

Igamov, B. D., G. T. Imanova, A. I. Kamardin, and I. R. Bekpulatov. 2024. “Investigation of Coatings Formed by Thermal Oxidation on Monocrystalline Silicon.” Integrated Ferroelectrics 240 (1): 53–63. doi:10.1080/10584587.2023.2296317.