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Micro-heater embedded Ni-SnO2 ordered nanoporous films: On-chip fabrication for fast, sensitive, and selective gas sensing towards multiple VOCs for air quality monitoring.
- Source :
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Sensors & Actuators B: Chemical . Feb2024, Vol. 401, pN.PAG-N.PAG. 1p. - Publication Year :
- 2024
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Abstract
- The ability to simultaneously detect multiple volatile organic compounds (VOCs) is crucial for assessing indoor air quality and addressing significant health hazards. In this study, we present a sacrificial template approach for on-chip fabrication of two-dimensional (2D) Ni-doped SnO 2 nanoporous sensing films on micro-heater substrates. The technical analysis shows that the resulting honeycomb-like ultrathin Ni-SnO 2 sensing layer on a suspended substrate maintains perfect structural integrity and consistency. The Ni-SnO 2 sensors exhibit exceptional characteristics, including a ppb-level detection limit, high sensitivity, fast response/recovery time, and signal repeatability for typical VOCs, while operating at a low power consumption of 25 mW. Additionally, the Ni-doping enhances the sensors' cross-sensitivity to various forms of VOCs, while causing a discernible response inhibition towards flammable or exhaust gases. Furthermore, X-ray photoelectron spectroscopy (XPS) and in-situ Raman spectra reveal a Ni2+-substitution induced surface adsorbed oxygen species enrichment mechanism for sensing enhancement. Thus, the developed Ni-SnO 2 sensors hold promise as future candidates for reliable air quality assessment by real-time monitoring of overall concentrations of multiple VOCs. [Display omitted] • On-chip fusion of Ni-SnO 2 porous sensing film is achieved by a template approach. • The Ni-SnO 2 sensor possesses perfect sensing performances to multiple VOCs vapors. • A high selectivity for VOCs sensing was achieved for air quality assessment. • The embedded micro-heater provides ultra-high heating efficiency for the sensor. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09254005
- Volume :
- 401
- Database :
- Academic Search Index
- Journal :
- Sensors & Actuators B: Chemical
- Publication Type :
- Academic Journal
- Accession number :
- 174318170
- Full Text :
- https://doi.org/10.1016/j.snb.2023.134907