Optical and electrical properties of niobium-doped indium oxide thin films prepared by co-sputtering technique.

• Niobium-doped indium oxide (InNbO) was prepared by co-sputtering technique. • InNbO is compact and uniform without obvious pores and cracks. • InNbO is cubic bixbyite polycrystalline structure. • The resistivity of InNbO is as low as 8.29 × 10–3 Ω· cm when the Nb content is 1.8 at%. • InNbO exhibits high optical transmittance from visible to near-infrared wavelength regions. Indium oxide (In 2 O 3) based thin films have attracted much attention due to their high transparency and low resistivity. In order to obtain good transmittance and high conductivity, niobium (Nb) element was chosen as dopant in In 2 O 3 in this study. Nb-doped In 2 O 3 thin films (InNbO) were deposited on substrate by co-sputtering technique. The influence of Nb content on the structural, optical and electrical properties of InNbO thin films was systematically investigated. These thin films are compact and uniform without obvious pores and cracks. And InNbO is cubic bixbyite structure similar to In 2 O 3. When Nb content is 1.8 at%, the resistivity of InNbO is as low as 8.29 × 10−3 Ω·cm. The prepared thin films exhibit high optical transmittance from visible to near-infrared wavelength regions. The average transmittance of InNbO thin films can reach 80.74 % in visible light range (380 ∼ 750 nm), and 75.71 % in near-infrared region (750 ∼ 2400 nm). [ABSTRACT FROM AUTHOR]