Emission of the backscattered electron in the energy range of 20 to100 keV.

• This paper presented the theoretical model of backscattered electron emission BEE, and the universal formulas for some parameters such as η (h , E po , Z), f (x , E po , Z and S (E po , Z) mean at E po = 20–100 keV were deduced, respectively. • The special formulas for some parameters such as η (h , E po , Z), f (x , E po , Z) and S (E po , Z) mean at E po = 20–100 keV of Au, Ag, Al, Cu, Bi and Pb were obtained and proved correct, respectively. • The special formulas for some parameters such as η (h , E po , Z), f (x , E po , Z) and S (E po , Z) mean of W and Mo were also obtained and proved correct, respectively. This paper presented the theoretical model of backscattered electron emission BEE, and the universal formulas for some parameters such as η (h , E po , Z) and f (x , E po , Z) at E po = 20–100 keV were deduced, respectively; where E po is the incident energy of primary electron, f (x , E po , Z) is maximum penetration depth distribution of emitted backscattered electron BE from atomic number Z bulk metals penetrated by primary electrons at E po , x is the distance from incident surface to the position where primary electrons are reflected back, η (h , E po , Z) is the backscattering coefficient at E po of Z metal films with film thickness h. From the deduced universal formula for η (h , E po , Z) and the relationships among the parameters of BEE from Au, W, Ag and Mo, the special formulas for some parameters such as η (h , E po , Z) and f (x , E po , Z) of W and Mo were also obtained and proved correct, respectively. [ABSTRACT FROM AUTHOR]