Transparent PbZr,TiO3PZT thin films on indium tin oxide-coated glass.

Transparent piezoelectric thin films on glass are sought after in piezoelectric microdevices. Here we report the fabrication of highly transparent (%T ≥ 70.0) Pb(Zr0.52Ti0.48)O3[PZT] thin films on indium tin oxide (ITO)-coated glass substrate. The effective transverse piezoelectric coefficient, e31,f, determined from both direct and converse piezoelectric effects for the PZT/ITO/glass unimorphs were 3.8 and 9.3 C m−2, respectively. Dielectric permittivity, ε r and dielectric loss, tan δ were 870 and 0.06, respectively. The high optical transparency and transverse piezoelectric coefficient obtained for the PZT/ITO/glass heterostructure suggest that they have good application potential in transparent piezoelectric thin film devices. [ABSTRACT FROM AUTHOR]