Model of the Interaction of Reactive Gases with Polymer Materials in Low-Pressure Radio-Frequency Plasma.

The aim of this work is to scientifically substantiate the mechanisms of plasma-chemical modification of polymeric materials in radio-frequency (RF) low-pressure discharge plasma. Using the method of molecular dynamics, a model describing the mechanisms of formation of oxygen- and nitrogen-containing functional groups on the surface of polymeric materials as a result of plasma modification was developed. The established mechanisms include multistep chemical reactions with the formation of alkyl dioxyl and alkoxyl radicals and unstable hydroperoxide groups. [ABSTRACT FROM AUTHOR]