Characterization of a Timepix detector for use in SEM acceleration voltage range.

Hybrid pixel direct electron detectors are gaining popularity in electron microscopy due to their excellent properties. Some commercial cameras based on this technology are relatively affordable which makes them attractive tools for experimentation especially in combination with an SEM setup. To support this, a detector characterization (Modulation Transfer Function, Detective Quantum Efficiency) of an Advacam Minipix and Advacam Advapix detector in the 15–30 keV range was made. In the current work we present images of Point Spread Function, plots of MTF/DQE curves and values of DQE(0) for these detectors. At low beam currents, the silicon detector layer behaviour should be dominant, which could make these findings transferable to any other available detector based on either Medipix2, Timepix or Timepix3 provided the same detector layer is used. • Timepix DED is excellent at 15–30 keV, PSF-MTF are near ideal, max DQE(0) is 60% • PSF-MTF degrade with e-beam energy increase, PSF-MTF improve with DED threshold rise • DQE values show a significant DQE reduction at increased detector threshold value • At 15keV beam energy both cameras show low DQE due to Al layer on top of sensor [ABSTRACT FROM AUTHOR]