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FOUR-DIMENSIONAL SCANNING TRANSMISSION ELECTRON MICROSCOPY: PART I: IMAGING, STRAIN MAPPING, AND DEFECT DETECTION.

Authors :
Johnston-Peck, Aaron C.
Herzing, Andrew A.
Source :
Electronic Device Failure Analysis. Aug2023, Vol. 25 Issue 3, p12-22. 10p.
Publication Year :
2023

Abstract

The article focuses on four-dimensional scanning transmission electron microscopy (4D-STEM) as a new analytical technique for high-resolution materials characterization. Topics discussed include image generation from 4D datasets using virtual detectors, the use of 4D-STEM for strain measurements, and the challenges and advancements in the field.

Details

Language :
English
ISSN :
15370755
Volume :
25
Issue :
3
Database :
Academic Search Index
Journal :
Electronic Device Failure Analysis
Publication Type :
Academic Journal
Accession number :
165132895
Full Text :
https://doi.org/10.31399/asm.edfa.2023-3.p012