Cite
Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing.
MLA
Lee, Gyeong Taek, et al. “Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing, vol. 36, no. 1, Feb. 2023, pp. 37–44. EBSCOhost, https://doi.org/10.1109/TSM.2022.3226716.
APA
Lee, G. T., Lim, H. G., & Jang, J. (2023). Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing, 36(1), 37–44. https://doi.org/10.1109/TSM.2022.3226716
Chicago
Lee, Gyeong Taek, Hyeong Gu Lim, and Jaeyeon Jang. 2023. “Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing 36 (1): 37–44. doi:10.1109/TSM.2022.3226716.