Cite
Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review.
MLA
Ngo, Anh Tuan, et al. “Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review.” IEEE Transactions on Semiconductor Manufacturing, vol. 36, no. 1, Feb. 2023, pp. 1–13. EBSCOhost, https://doi.org/10.1109/TSM.2022.3217326.
APA
Ngo, A. T., Dey, B., Halder, S., De Gendt, S., & Wang, C. (2023). Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review. IEEE Transactions on Semiconductor Manufacturing, 36(1), 1–13. https://doi.org/10.1109/TSM.2022.3217326
Chicago
Ngo, Anh Tuan, Bappaditya Dey, Sandip Halder, Stefan De Gendt, and Changhai Wang. 2023. “Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review.” IEEE Transactions on Semiconductor Manufacturing 36 (1): 1–13. doi:10.1109/TSM.2022.3217326.