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Transient liquid phase bonding technique for ultrahigh-vacuum compatible bimorph mirrors used in soft x-ray beamlines.

Transient liquid phase bonding technique for ultrahigh-vacuum compatible bimorph mirrors used in soft x-ray beamlines.

Authors :
Yuan, Debo
Liu, Zhengkun
Xiong, Ying
Zhou, Zhiyong
Zhang, Guobin
Source :
Review of Scientific Instruments. Jan2023, Vol. 94 Issue 1, p1-7. 7p.
Publication Year :
2023

Abstract

Bimorph mirrors place stringent requirements on the welding technology of silicon substrates and piezoelectric ceramics to ensure their ultrahigh-vacuum compatibility. Conventional welding techniques usually require high temperature and pressure, which have a high impact on the welding substrate, while the use of organic adhesives for bonding does not guarantee their stability in ultrahigh vacuum. Here, the transient liquid phase bonding technology based on an Au–In metal system was studied to meet the requirement for ultrahigh-vacuum application. The microstructure, chemical composition, and related mechanical properties of the bonding at different welding conditions were investigated. Meanwhile, the piezo ceramics and the bond were baked at 150 °C to test the stability. The results show that a stable bonding was achieved between centimeter-scaled single crystal silicon and lead zirconate titanate ceramics at 200 °C temperature and 2.5 MPa pressure, and the piezo ceramics and the bond are not damaged by baking to 150 °C for 48 h. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00346748
Volume :
94
Issue :
1
Database :
Academic Search Index
Journal :
Review of Scientific Instruments
Publication Type :
Academic Journal
Accession number :
161626471
Full Text :
https://doi.org/10.1063/5.0102210