A look into donor–acceptor compensation in ZnO thin films driven by dopant valence.

Carrier (electron) compensation is an important issue in impurity (donor) doped ZnO thin films, which must be understood to achieve the desired electrical conductivity. Unprecedentedly, using trivalent Al, tetravalent Ti, and pentavalent Vanadium, (the atomic symbol is not used to avoid confusion with the conventional vacancy symbol) metal ion doping in ZnO thin films while keeping all the growth and annealing parameters similar, we demonstrate that donor–acceptor (D-A) compensation in the doped film is influenced largely by the dopant valence. Hall data show a drastic decrease in the conductivity and carrier concentration values indicating progressively more D-A compensation as the dopant valence increases. Post-growth annealing in special ambient recovers trapped free carriers due to dopants' activation. The activation of the dopants due to annealing in Ar + 10% H2 + excess Zn ambient is far more than that happened in only Ar + 10% H2 ambient. To support this, we further discuss the dark and photo-Hall electrical transport data of the as-grown and annealed films measured under sub-bandgap photo-excitations to release the electrons from the acceptor-like complexes. [ABSTRACT FROM AUTHOR]