Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO 2 ALD Properties for Improved Electrical and Reliability Parameters.

MLA

Falidas, Konstantinos Efstathios, et al. “Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO 2 ALD Properties for Improved Electrical and Reliability Parameters.” Materials (1996-1944), vol. 15, no. 23, Dec. 2022, p. 8325. EBSCOhost, https://doi.org/10.3390/ma15238325.

APA

Falidas, K. E., Kühnel, K., Rudolph, M., Everding, M. B., Czernohorsky, M., & Heitmann, J. (2022). Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO 2 ALD Properties for Improved Electrical and Reliability Parameters. Materials (1996-1944), 15(23), 8325. https://doi.org/10.3390/ma15238325

Chicago

Falidas, Konstantinos Efstathios, Kati Kühnel, Matthias Rudolph, Maximilian B. Everding, Malte Czernohorsky, and Johannes Heitmann. 2022. “Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO 2 ALD Properties for Improved Electrical and Reliability Parameters.” Materials (1996-1944) 15 (23): 8325. doi:10.3390/ma15238325.