Thermal Flow Sensor With a Bidirectional Thermal Reference.

MLA

Okamoto, Yuki, et al. “Thermal Flow Sensor With a Bidirectional Thermal Reference.” Journal of Microelectromechanical Systems, vol. 31, no. 5, Oct. 2022, pp. 830–39. EBSCOhost, https://doi.org/10.1109/JMEMS.2022.3195169.

APA

Okamoto, Y., Nguyen, T.-V., Okada, H., & Ichiki, M. (2022). Thermal Flow Sensor With a Bidirectional Thermal Reference. Journal of Microelectromechanical Systems, 31(5), 830–839. https://doi.org/10.1109/JMEMS.2022.3195169

Chicago

Okamoto, Yuki, Thanh-Vinh Nguyen, Hironao Okada, and Masaaki Ichiki. 2022. “Thermal Flow Sensor With a Bidirectional Thermal Reference.” Journal of Microelectromechanical Systems 31 (5): 830–39. doi:10.1109/JMEMS.2022.3195169.