Design and analysis of SP4T RF MEMS switch for satellite applications.

In this paper, SP4T (Single Pole four throw) type RF MEMS Switch is designed for Satellite applications. The beam thickness of the switch is varying from 1 μm, 1.5 μm, and 2 μm. The capacitive and series beam is designed with 3 models. The device is a combination of series and shunt made up of 4 capacitive switches and 4 series switches. By using the COMSOL Multiphysics tool, we obtained the series switch has 8.9 V pull-in voltage and the shunt switch has 10 V at a beam thickness of 1 μm and the related capacitance ratio is 112. Using the HFSS method, performance analysis is found to achieve isolation and insertion loss at 62 dB and 0.4 dB at 14 GHz. [ABSTRACT FROM AUTHOR]