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Aluminum Frenkel defects cause hysteresis in Al2O3/AlGaN capacitors.
- Source :
-
Journal of Applied Physics . 10/28/2022, Vol. 132 Issue 16, p1-8. 8p. - Publication Year :
- 2022
-
Abstract
- Al 2 O 3 /AlGaN metal-oxide-semiconductor capacitors show a hysteretic behavior in their capacitance vs voltage characteristics, often attributed to near-interface traps deriving from defects within the oxide layer. The origin as well as the structural/electronic properties of such defects are still strongly debated in the literature. Here, we use ab initio molecular dynamics and the climbing-image nudged elastic band method to show that aluminum Frenkel defects give rise to bistable trap states in disordered and stoichiometric Al 2 O 3. Based on these results, we propose a calibrated polaron model representing a distribution of individually interacting energy levels with an internal reconfiguration mode and coupled to continuous bands of carriers to explain the hysteresis mechanism in Al 2 O 3 /AlGaN capacitors. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 132
- Issue :
- 16
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 159959085
- Full Text :
- https://doi.org/10.1063/5.0112976