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Aluminum Frenkel defects cause hysteresis in Al2O3/AlGaN capacitors.

Authors :
Deretzis, I.
Fiorenza, P.
Fazio, T.
SchilirĂ², E.
Lo Nigro, R.
Greco, G.
Fisicaro, G.
Roccaforte, F.
La Magna, A.
Source :
Journal of Applied Physics. 10/28/2022, Vol. 132 Issue 16, p1-8. 8p.
Publication Year :
2022

Abstract

Al 2 O 3 /AlGaN metal-oxide-semiconductor capacitors show a hysteretic behavior in their capacitance vs voltage characteristics, often attributed to near-interface traps deriving from defects within the oxide layer. The origin as well as the structural/electronic properties of such defects are still strongly debated in the literature. Here, we use ab initio molecular dynamics and the climbing-image nudged elastic band method to show that aluminum Frenkel defects give rise to bistable trap states in disordered and stoichiometric Al 2 O 3. Based on these results, we propose a calibrated polaron model representing a distribution of individually interacting energy levels with an internal reconfiguration mode and coupled to continuous bands of carriers to explain the hysteresis mechanism in Al 2 O 3 /AlGaN capacitors. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00218979
Volume :
132
Issue :
16
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
159959085
Full Text :
https://doi.org/10.1063/5.0112976