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Chemical vapor deposition: a potential tool for wafer scale growth of two-dimensional layered materials.

Authors :
El Hammoumi, Mohammed
Chaudhary, Vivek
Neugebauer, P
El Fatimy, A
Source :
Journal of Physics D: Applied Physics. 11/24/2022, Vol. 55 Issue 47, p1-18. 18p.
Publication Year :
2022

Abstract

The rapidly growing demand for high-performance and low-power electronic and photonic devices has driven attention towards novel two-dimensional (2D) layered materials. In this regard, 2D layered materials, including graphene, molybdenum disulfide (MoS2), and newly discovered phosphorene, have the potential to take over the existing semiconductor industry due to their intriguing features, such as excellent electrical conductivity, strong lightâ€"matter interaction, and especially the ability to scale down the resulting device to the atomic level. However, to explore the full potential of these materials in various technological applications, it is essential to develop a large-scale synthesis method that can provide uniform, defect-free thin film. The chemical vapor deposition (CVD) technique has been proven to produce large-scale and less defective 2D crystals with reasonably good quality and uniformity compared to other elaboration techniques, such as molecular beam epitaxy. This article discusses whether CVD may improve 2D layered materials growth, including graphene and MoS2, and whether it can be used to grow phosphorene. Only a few attempts have been made using CVD-like methods to grow phosphorene directly on the substrate. Still, one has to go long to establish a proper CVD method for phosphorene synthesis. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00223727
Volume :
55
Issue :
47
Database :
Academic Search Index
Journal :
Journal of Physics D: Applied Physics
Publication Type :
Academic Journal
Accession number :
159375828
Full Text :
https://doi.org/10.1088/1361-6463/ac928d