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On the impact of substrate contact resistance in bifacial MIS-type lifetime structures.

Authors :
Herguth, Axel
Kostrzewa, Fabian
Sperber, David
Source :
AIP Conference Proceedings. 8/24/2022, Vol. 2487 Issue 1, p1-5. 5p.
Publication Year :
2022

Abstract

Bifacial metal-insulator-semiconductor (MIS) structures are used to intentionally manipulate field-effect passivation of dielectric layers on crystalline silicon substrates during lifetime measurements by external biasing. It is found that the impact of biasing on surface passivation depends on the quality of the substrate contact, in particular in asymmetric front/rear biasing conditions. A mathematical model is presented and used to demonstrate the problems arising from a high substrate contact resistance. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
0094243X
Volume :
2487
Issue :
1
Database :
Academic Search Index
Journal :
AIP Conference Proceedings
Publication Type :
Conference
Accession number :
158692779
Full Text :
https://doi.org/10.1063/5.0089293