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Interfacial chemical vapor deposition of wrinkle-free bilayer graphene on dielectric substrates.
- Source :
-
Applied Surface Science . Nov2022, Vol. 602, pN.PAG-N.PAG. 1p. - Publication Year :
- 2022
-
Abstract
- [Display omitted] • Ultrathin metal leaf to achieve conformal interface and uniform carbon precipitation. • BLG grown on dielectric substrates shows sub-nm surface roughness. • The interface-grown graphene exhibits nearly zero strain. • BLG grown on sapphire shows long-range scattering mobility of ∼1000 cm2V−1 s−1. • Facile, versatile and scalable synthesis route for wrinkle-free graphene production. Wrinkles invariably form during graphene growth and post-growth transfer, limiting graphene films' large-scale uniformity for electronic applications. We report a transfer-free synthesis route for highly-uniform bilayer graphene directly on dielectric substrates—SiO 2 , sapphire, and MgO—by interfacial carbon precipitation. Ultrathin Pd leaves having a thickness of 150 nm and grain size up to 100 µm are laminated onto the target dielectric substrate, followed by annealing and press rolling to form a uniform Pd-substrate interface. Rapid heating in a hydrocarbon atmosphere causes carbon diffusion through the Pd layer; upon cooling, precipitation of carbon results in graphene growth at the Pd-substrate interface. The interface-grown graphene remains on the substrate after removing the Pd layer by wet etching. It exhibits sub-nm surface roughness without wrinkles or folds. Over 94 % of the interface-grown area is dominated by bilayer graphene with low twist angles. In addition, the interface-grown graphene is nearly strain-free. From Raman characterization, an average long-range scattering mobility of ∼1000 cm2 V−1 s−1 was estimated for as-grown bilayer graphene on sapphire (0001) at room temperature. This technique shows promise to achieve device scale, ultra-uniform graphene fabrication directly on dielectric substrates, with the potential to accelerate graphene applications in electronics, photonics, and sensing. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 01694332
- Volume :
- 602
- Database :
- Academic Search Index
- Journal :
- Applied Surface Science
- Publication Type :
- Academic Journal
- Accession number :
- 158388596
- Full Text :
- https://doi.org/10.1016/j.apsusc.2022.154367