Two-dimensional dopant potential mapping in a fin field effect transistor by off-axis electron holography.

MLA

Gribelyuk, Michael A., et al. “Two-Dimensional Dopant Potential Mapping in a Fin Field Effect Transistor by off-Axis Electron Holography.” Journal of Applied Physics, vol. 132, no. 4, July 2022, pp. 1–14. EBSCOhost, https://doi.org/10.1063/5.0091586.

APA

Gribelyuk, M. A., Mehta, S., Johnson, J. B., & Kimball, L. (2022). Two-dimensional dopant potential mapping in a fin field effect transistor by off-axis electron holography. Journal of Applied Physics, 132(4), 1–14. https://doi.org/10.1063/5.0091586

Chicago

Gribelyuk, Michael A., Sanjay Mehta, Jeffrey B. Johnson, and Lee Kimball. 2022. “Two-Dimensional Dopant Potential Mapping in a Fin Field Effect Transistor by off-Axis Electron Holography.” Journal of Applied Physics 132 (4): 1–14. doi:10.1063/5.0091586.