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Graphical user interface for SDTrimSP to simulate sputtering, ion implantation and the dynamic effects of ion irradiation.

Authors :
Szabo, P.S.
Weichselbaum, D.
Biber, H.
Cupak, C.
Mutzke, A.
Wilhelm, R.A.
Aumayr, F.
Source :
Nuclear Instruments & Methods in Physics Research Section B. Jul2022, Vol. 522, p47-53. 7p.
Publication Year :
2022

Abstract

SDTrimSP is a popular simulation program to compute several effects of the interaction between an impinging ion and a solid, such as ion implantation ranges, damage formation or sputtering of surface atoms. We now introduce a graphical user interface for SDTrimSP to make its operation more accessible for a broad group of users. It is written as a separate Python program and is not restricted to any specific operating system. The interface allows a quick and easy start as well as the direct evaluation of SDTrimSP simulations. Its capabilities are demonstrated here in the form of several example cases, including the dynamic simulations with SDTrimSP, where ion-induced target changes are taken into account. The presented graphical user interface is made freely available to support a large number of users in performing simulations of ion–solid interaction. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
0168583X
Volume :
522
Database :
Academic Search Index
Journal :
Nuclear Instruments & Methods in Physics Research Section B
Publication Type :
Academic Journal
Accession number :
156942309
Full Text :
https://doi.org/10.1016/j.nimb.2022.04.008