Initial Stages of Growth of Semipolar AlN on a Nanopatterned Si(100) Substrate.

MLA

Bessolov, V. N., et al. “Initial Stages of Growth of Semipolar AlN on a Nanopatterned Si(100) Substrate.” Semiconductors, vol. 55, no. 10, Oct. 2021, pp. 812–15. EBSCOhost, https://doi.org/10.1134/S1063782621100043.

APA

Bessolov, V. N., Konenkova, E. V., Orlova, T. A., & Rodin, S. N. (2021). Initial Stages of Growth of Semipolar AlN on a Nanopatterned Si(100) Substrate. Semiconductors, 55(10), 812–815. https://doi.org/10.1134/S1063782621100043

Chicago

Bessolov, V. N., E. V. Konenkova, T. A. Orlova, and S. N. Rodin. 2021. “Initial Stages of Growth of Semipolar AlN on a Nanopatterned Si(100) Substrate.” Semiconductors 55 (10): 812–15. doi:10.1134/S1063782621100043.