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Laser Etching of Germanium.

Authors :
Zheleznov, V. Yu.
Malinskiy, T. V.
Mikolutskiy, S. I.
Rogalin, V. E.
Filin, S. A.
Khomich, Yu. V.
Yamshchikov, V. A.
Kaplunov, I. A.
Ivanova, A. I.
Source :
Technical Physics Letters. Oct2021, Vol. 47 Issue 10, p734-736. 3p.
Publication Year :
2021

Abstract

Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities (E ∼ 0.5–1.15 J/cm2) in the absence of noticeable traces of crater formation. It is suggested that the ablation centers nucleate on dislocations escaping at the surface of germanium crystals. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
10637850
Volume :
47
Issue :
10
Database :
Academic Search Index
Journal :
Technical Physics Letters
Publication Type :
Academic Journal
Accession number :
155758713
Full Text :
https://doi.org/10.1134/S1063785021070282