High-Precision Tracking of Periodic Signals: A Macro–Micro Approach With Quantized Feedback.

This article proposes a novel control design method for high-precision positioning systems. The method aims to eliminate the tracking error caused by measurement quantization present in positioning systems with incremental encoders. By employing a combined internal model based feedback and quantized feedforward design, we are able to make the output of the positioning system asymptotically track any input signal with one or more sinusoidal components of known frequencies and a possible constant component. When combined with a micro-actuator, the resulting dual-stage positioning system is able to track any continuous periodic signal with a known period. Besides theoretical guarantees, the proposed design is validated experimentally and proved able to achieve asymptotic tracking error below $\pm \text{1}\ \mu$ m when subject to a sensor quantization level of 5 $\mu$ m. [ABSTRACT FROM AUTHOR]