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Phase tailoring of Ta films via buffer layer-thicknesses controlling.
- Source :
-
Scripta Materialia . Apr2022, Vol. 212, pN.PAG-N.PAG. 1p. - Publication Year :
- 2022
-
Abstract
- Hard β-Ta phase is generally produced during Ta film deposition. While in some cases, soft α-Ta phase is preferred to ensure deformation capability. In this work, templated growth strategy by introducing Cr buffer layer is proposed to tailor the phase composition in Ta films. A broad spectrum of β-Ta/α-Ta ratio from 90% to 0% can be continuously and precisely achieved when the buffer layer thickness is correspondingly controlled from 0 to ∼90 nm. Hardness of the Ta films is well proportional to the β-Ta/α-Ta ratio. The underlying mechanism of phase tailoring is rationalized by demonstrating the thickness-dependent crystallization of buffer layer. [Display omitted]. [ABSTRACT FROM AUTHOR]
- Subjects :
- *BUFFER layers
*TANTALUM
*EPITAXY
*PHASE transitions
*HARDNESS
*CRYSTALLIZATION
Subjects
Details
- Language :
- English
- ISSN :
- 13596462
- Volume :
- 212
- Database :
- Academic Search Index
- Journal :
- Scripta Materialia
- Publication Type :
- Academic Journal
- Accession number :
- 155338780
- Full Text :
- https://doi.org/10.1016/j.scriptamat.2022.114582