DeePattern: Layout Pattern Generation With Transforming Convolutional Auto-Encoder.

MLA

Yang, Haoyu, et al. “DeePattern: Layout Pattern Generation With Transforming Convolutional Auto-Encoder.” IEEE Transactions on Semiconductor Manufacturing, vol. 35, no. 1, Feb. 2022, pp. 67–77. EBSCOhost, https://doi.org/10.1109/TSM.2021.3139354.

APA

Yang, H., Li, S., Chen, W., Pathak, P., Gennari, F., Lai, Y.-C., & Yu, B. (2022). DeePattern: Layout Pattern Generation With Transforming Convolutional Auto-Encoder. IEEE Transactions on Semiconductor Manufacturing, 35(1), 67–77. https://doi.org/10.1109/TSM.2021.3139354

Chicago

Yang, Haoyu, Shuhe Li, Wen Chen, Piyush Pathak, Frank Gennari, Ya-Chieh Lai, and Bei Yu. 2022. “DeePattern: Layout Pattern Generation With Transforming Convolutional Auto-Encoder.” IEEE Transactions on Semiconductor Manufacturing 35 (1): 67–77. doi:10.1109/TSM.2021.3139354.