Influence of different design parameters on a coplanar capacitive sensor performance.

Coplanar capacitive sensors are employed in Non-destructive Testing (NDT) methods to measure the difference in dielectric properties of the materials. The most important design parameters for a coplanar capacitive sensor include the shape, size, and separation distance of the electrodes which affect the sensor performance. In addition, the impact of the shielding plate and guard electrode should be considered. In the framework of this paper, numerical simulations and physical experiments are studied for two shapes of electrodes, triangular and rectangular, by examining different sizes and different separation distances between electrodes to assess and analyze the important features of the coplanar capacitive electrodes, such as the penetration and strength of the electric field as a function of sensor geometrical properties. Therefore, a detailed analysis of numerical simulation using Finite Element Modelling (FEM) is provided to study these geometric parameters. In addition, the influence of the different frequencies, lift-off, and the presence or absence of a metal shielding plate and guard electrode on the output result is analyzed. Finally, sensors were manufactured and several experiments were carried out under different configurations. Comparison of the numerical simulation results and physical experiments illustrate that they are in good qualitative agreement. [ABSTRACT FROM AUTHOR]