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Design, fabrication, and characterization of an SLA 3D printed nanocomposite electromagnetic microactuator.

Authors :
Dehghan, Mohammad
Tahmasebipour, Mohammad
Ebrahimi, Shadi
Source :
Microelectronic Engineering. Feb2022, Vol. 254, pN.PAG-N.PAG. 1p.
Publication Year :
2022

Abstract

Electromagnetic microactuators are a key component of the membrane-based microelectromechanical devices to provide controllable and precise movements. However, their fabrication by traditional soft lithography remains a time-consuming, labor-intensive, and high-cost operation. This paper presents a novel material used in this SLA 3D printed electromagnetic nanocomposite microactuator, which has advantages in costs and time saving by a simplified fabrication process and minimum chances of human interactions. The nanocomposite magnetic microactuator consists of Fe 3 O 4 nanoparticles with excellent magnetic properties dispersed in a photo-polymerizable FLGPCL04 resin. First, the coil specifications include the temperature and magnetic field of the coil are examined to control the microactuator performance. After that, the effect of variation in coil turn number, coil current, and Fe 3 O 4 nanoparticle concentration on the microactuator performance is investigated to improve the membrane displacement. The membrane with 5 wt-% nanoparticles concentration has achieved a displacement of 65 μm for an electric current of 1000 mA in 12 s. To control the return time of the membrane and reduce the recovery time, a bidirectional structure is used in the proposed microactuator. With this mechanism, it takes 10 s to return the nanocomposite membrane of the microactuator to the original location after achieved maximum displacement. Design process workflow includes (A) components mixing (B) uniform nanocomposite producing and (C) microactuator printing (D) Obtained results from the system characterization [Display omitted] • 3D printing of unidirectional and bidirectional nanocomposite electromagnetic microactuator. • Synthesis of a magnetic nanocomposite material from photo-polymerizable FLGPCL04 resin and Fe 3 O 4 nanoparticles. • Achieving the maximum membrane deflection of 65 μm within 12 s by an electric current of 1000 mA. • Controlling the return time of the nanocomposite membrane with a bidirectional actuation. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
01679317
Volume :
254
Database :
Academic Search Index
Journal :
Microelectronic Engineering
Publication Type :
Academic Journal
Accession number :
154692289
Full Text :
https://doi.org/10.1016/j.mee.2021.111695