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AlN with high strength and high thermal conductivity based on an MCAS-Y2O3-YSZ multi-additive system.

Authors :
Baek, Su-Hyun
Jeong, Hyeondeok
Ryu, Sung-Soo
Source :
Journal of the European Ceramic Society. Mar2022, Vol. 42 Issue 3, p898-904. 7p.
Publication Year :
2022

Abstract

The additive composition of an AlN ceramic substrate material was optimized to achieve high strength and thermal conductivity. MgO-CaO-Al 2 O 3 -SiO 2 (MCAS) glass and Y 2 O 3 were used as basic additives for improved sintering properties and thermal conductivity, thereby allowing for AlN to be sintered at a relatively low temperature of 1600 °C without pressurization. Yttria-stabilized zirconia (YSZ) was added (0–3 wt%) to further improve the strength of the AlN ceramic. YSZ and Y 2 O 3 reacted with AlN to produce ZrN, Y 4 Al 2 O 9 , and Y 3 Al 5 O 12 secondary phases. The formation of these yttrium aluminate phases improved the thermal conductivity by removing oxygen impurities, while ZrN formed at the AlN grain boundaries provided resistance to grain boundary fractures for improved strength. Overall, the AlN ceramic with 1 wt% MCAS, 3 wt% Y 2 O 3 , and 1 wt% YSZ exhibited excellent thermal and mechanical properties, including a thermal conductivity of 109 W/mK and flexural strength of 608 MPa. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
09552219
Volume :
42
Issue :
3
Database :
Academic Search Index
Journal :
Journal of the European Ceramic Society
Publication Type :
Academic Journal
Accession number :
153870369
Full Text :
https://doi.org/10.1016/j.jeurceramsoc.2021.11.012