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ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient.
- Source :
-
Journal of Microelectromechanical Systems . Oct2021, Vol. 30 Issue 5, p677-679. 3p. - Publication Year :
- 2021
-
Abstract
- The effective electromechanical coupling coefficient (${K}_{eff}^{2}{)}$ of resonators is crucial for application in radio communication such as fabricating bandpass filters. In this letter, we present a $0^{\text {th}}$ symmetry (${S}_{0}{)}$ mode Lamé mode resonator (LMR) operating at 2.563 GHz with a high ${K}_{\vphantom {D_{j}}{eff}}^{2}$ of 7.83%. A 20% Scandium-doped Aluminum Nitride (Sc0.2Al0.8N)/AlN composite piezoelectric film is used as the piezoelectric layer. The ratio of piezoelectric layer thickness (${t}_{\vphantom {D_{j}}{pie}}{)}$ and electrode pitch (${P}_{ele}{)}$ is optimized by finite element analysis (FEA) method and the highest experimental ${K}_{eff}^{2}$ is obtained at ${t}_{pie}/{P}_{ele} =0.65$. The proposed LMR with Sc doping and structural optimization shows fascinating prospects for constructing broadband filters. [2021-0113] [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 30
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 153764149
- Full Text :
- https://doi.org/10.1109/JMEMS.2021.3102145