Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy.

Atomic layer plasma treatment (ALPT) enhances the corrosion protection of the ZrO 2 film prepared by thermal-driven ALD mode (TALD-ZrO 2) and further reduces the corrosion rate of Mg Ca alloy by more than an order of magnitude. The ALPT effect significantly increases the crystallinity and reduces the oxygen defects of TALD-ZrO 2 film. The ALPT time of 30 s has the most increase in the polarization resistance of TALD-ZrO 2 film, from 1.8kΩ·cm2 to 74.7kΩ·cm2. The enhancement of corrosion resistance of TALD-ZrO 2 film caused by the 30s-ALPT is equivalent to the thickness effect of increasing the thickness from 200 cycles to 300 cycles. ALPT technique is considered as a potential and feasible method to prepare TALD-ZrO 2 films with high film quality and excellent corrosion protection. • ALPT effectively enhances the corrosion protection performance of TALD-ZrO 2 film on Mg-Ca alloy. • Clarify that ALPT technique effectively improves the quality of the TALD-ZrO 2 films. • 30s-ALPT greatly enhances the polarization resistance from 1.8kΩ·cm2 to 74.7kΩ·cm2. • Clarify that ALPT significantly improves the long-term protection performance of TALD-ZrO 2 film on Mg-Ca alloy. [ABSTRACT FROM AUTHOR]