TiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques.

MLA

Nemec, Pavol, et al. “TiO2 Sensoric Structures with Controlled Extension of Their Active Area by Electron-Beam Lithography and Reactive Ion Etching Techniques.” AIP Conference Proceedings, vol. 2411, no. 1, Nov. 2021, pp. 1–6. EBSCOhost, https://doi.org/10.1063/5.0067745.

APA

Nemec, P., Hotovy, I., Rehacek, V., & Andok, R. (2021). TiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques. AIP Conference Proceedings, 2411(1), 1–6. https://doi.org/10.1063/5.0067745

Chicago

Nemec, Pavol, Ivan Hotovy, Vlastimil Rehacek, and Robert Andok. 2021. “TiO2 Sensoric Structures with Controlled Extension of Their Active Area by Electron-Beam Lithography and Reactive Ion Etching Techniques.” AIP Conference Proceedings 2411 (1): 1–6. doi:10.1063/5.0067745.