Cite
Investigation Into Low Frequency Response of Acoustic MEMS for Determination of Failure Modes.
MLA
Hantos, Gergely, and Marc P. Y. Desmulliez. “Investigation Into Low Frequency Response of Acoustic MEMS for Determination of Failure Modes.” IEEE Transactions on Semiconductor Manufacturing, vol. 34, no. 3, Aug. 2021, pp. 262–69. EBSCOhost, https://doi.org/10.1109/TSM.2021.3065553.
APA
Hantos, G., & Desmulliez, M. P. Y. (2021). Investigation Into Low Frequency Response of Acoustic MEMS for Determination of Failure Modes. IEEE Transactions on Semiconductor Manufacturing, 34(3), 262–269. https://doi.org/10.1109/TSM.2021.3065553
Chicago
Hantos, Gergely, and Marc P. Y. Desmulliez. 2021. “Investigation Into Low Frequency Response of Acoustic MEMS for Determination of Failure Modes.” IEEE Transactions on Semiconductor Manufacturing 34 (3): 262–69. doi:10.1109/TSM.2021.3065553.