A bending-bending mode piezoelectric actuator based on PIN-PMN-PT crystal stacks.

• Bending-bending mode piezoelectric actuator with crystal stacks are proposed and evaluated. • Ultrahigh piezoelectric coefficient d 33 of ~10,800 pC/N are achieved in actuation crystal stacks. • Due to high piezoelectricity and bending mode, max velocity is 3.28 mm/s under 130 V pp. • Minimum step resolution of 0.35 µm is demonstrated under 25 V pp driving voltage. [Display omitted] Piezoelectric actuators are important elements for compact actuations with high precision; however, driving voltage reduction is demanding for integration and minimization of precision actuations. In this work, we proposed a bending-bending mode piezoelectric actuator based on multilayered Pb(In 1/2 Nb 1/2)O 3 -Pb(Mg 1/3 Nb 2/3)O 3 -PbTiO 3 (PIN-PMN-PT) single crystals. Ultrahigh apparent piezoelectric coefficient d 33 of ~10,800 pC/N is achieved in four crystal stacks. The crystal stacks are used to fabricate bending-bending mode piezoelectric actuators to reduce driving voltage. Experimental results show that it can produce a maximum traveling velocity of 3.28 mm/s under the driving voltage of 130 V pp at 1000 Hz and minimum step resolution of 0.35 µm with 25 V pp driving voltage. Conventional piezoelectric actuators require driving voltage of ~300 V pp for similar motion velocity. This work demonstrates advantages of crystal stacks in piezoelectric actuators and potential applications in low-voltage precise actuations. [ABSTRACT FROM AUTHOR]