Foundations of capacitive and inductive radio-frequency discharges.

MLA

Chabert, Pascal, et al. “Foundations of Capacitive and Inductive Radio-Frequency Discharges.” Plasma Sources Science & Technology, vol. 30, no. 2, Feb. 2021, pp. 1–24. EBSCOhost, https://doi.org/10.1088/1361-6595/abc814.

APA

Chabert, P., Tsankov, T. V., & Czarnetzki, U. (2021). Foundations of capacitive and inductive radio-frequency discharges. Plasma Sources Science & Technology, 30(2), 1–24. https://doi.org/10.1088/1361-6595/abc814

Chicago

Chabert, Pascal, Tsanko Vaskov Tsankov, and Uwe Czarnetzki. 2021. “Foundations of Capacitive and Inductive Radio-Frequency Discharges.” Plasma Sources Science & Technology 30 (2): 1–24. doi:10.1088/1361-6595/abc814.