Fluence-dependent microstructure and nanomechanical property in Co-Ni-V medium entropy alloy thin films.

Via tuning deposition power, a series of Co-Ni-V medium entropy alloy thin films, growing in a nanocolumn manner, with different microstructures and morphologies were synthesized. With increasing fluence, both the crystallinity and nanocolumn size experienced a process of first increasing and then decreasing, controlled by the adatom surface diffusion vs. deposition rate competition. Meanwhile, continuous strengthening with fluence was ascribed to improved bonding and reduced fraction of boundary at low fluence and amorphization reinforcement effect in high fluence range. [Display omitted] [ABSTRACT FROM AUTHOR]