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Digital-micromirror-device-based surface measurement using heterodyne interferometry with optical frequency comb.
- Source :
-
Applied Physics Letters . 2021, Vol. 118 Issue 25, p1-5. 5p. - Publication Year :
- 2021
-
Abstract
- We propose a surface measurement method based on optical frequency comb heterodyne interferometry ranging. A digital micromirror device is used to establish a single-pixel detection system without a mechanical scanning device and realize high-speed sampling. The measurement range of the step height is extended by synthetic wavelength interferometry from half of the carrier wavelength to half of the synthetic wavelength (40 μm in this system). Thus, a sample composed of three gauge blocks and an MEMS device of the teardrop-shaped groove were measured with an accuracy of 5 nm and a measurement time of 27 ms. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 118
- Issue :
- 25
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 151080781
- Full Text :
- https://doi.org/10.1063/5.0050307