Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes.

MLA

Behroudj, A., et al. “Exploring Nanowire Regrowth for the Integration of Bottom-up Grown Silicon Nanowires into AFM Scanning Probes.” Journal of Micromechanics & Microengineering, vol. 31, no. 5, May 2021, pp. 1–11. EBSCOhost, https://doi.org/10.1088/1361-6439/abf332.

APA

Behroudj, A., Salimitari, P., Nilsen, M., & Strehle, S. (2021). Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes. Journal of Micromechanics & Microengineering, 31(5), 1–11. https://doi.org/10.1088/1361-6439/abf332

Chicago

Behroudj, A, P Salimitari, M Nilsen, and S Strehle. 2021. “Exploring Nanowire Regrowth for the Integration of Bottom-up Grown Silicon Nanowires into AFM Scanning Probes.” Journal of Micromechanics & Microengineering 31 (5): 1–11. doi:10.1088/1361-6439/abf332.