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SNOM photolithography produces 20-nm features.
- Source :
-
Laser Focus World . Oct2004, Vol. 40 Issue 10, p15-15. 1/3p. - Publication Year :
- 2004
-
Abstract
- Reports that scientists at the Data Storage Institute have written lines as mall as 20 nanometer in width using near-field scanning optical microscope. Nonlinear effects in the resist produced by the light source; Fabrication of semiconductor chips via photolithography; Low laser power effects.
Details
- Language :
- English
- ISSN :
- 10438092
- Volume :
- 40
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- Laser Focus World
- Publication Type :
- Periodical
- Accession number :
- 14836247