Cite
Shape classification of fumed silica abrasive and its effects on chemical mechanical polishing.
MLA
Kim, Eungchul, et al. “Shape Classification of Fumed Silica Abrasive and Its Effects on Chemical Mechanical Polishing.” Powder Technology, vol. 381, Mar. 2021, pp. 451–58. EBSCOhost, https://doi.org/10.1016/j.powtec.2020.11.058.
APA
Kim, E., Lee, J., Park, Y., Shin, C., Yang, J., & Kim, T. (2021). Shape classification of fumed silica abrasive and its effects on chemical mechanical polishing. Powder Technology, 381, 451–458. https://doi.org/10.1016/j.powtec.2020.11.058
Chicago
Kim, Eungchul, Jaewon Lee, Younghun Park, Cheolmin Shin, Jichul Yang, and Taesung Kim. 2021. “Shape Classification of Fumed Silica Abrasive and Its Effects on Chemical Mechanical Polishing.” Powder Technology 381 (March): 451–58. doi:10.1016/j.powtec.2020.11.058.