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X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications.
- Source :
-
Journal of Microelectromechanical Systems . Dec2020, Vol. 29 Issue 6, p1464-1472. 9p. - Publication Year :
- 2020
-
Abstract
- This article reports Lithium Niobate (LN) based shear horizontal (SH0) resonators utilizing suspended and solidly mounted structures for radio frequency (RF) applications. The solidly mounted SH0 structure (also termed guided SH0 structure) is advantageous in obtaining reduced temperature coefficient of frequency (TCF), reduced high frequency overtone spurious responses, and improved power handling. The demonstrated solidly mounted guided SH0 resonators exhibit a mechanical Q as high as 1316 around 950 MHz, and electromechanical coupling factor (${k} _{\mathrm {t}}^{\mathrm {2}}$) of around 21.8 % - resulting in a figure of merit ($\mathrm {FoM}=k_{\mathrm {t}}^{\mathrm {2}}\cdot \mathrm {Q}$) of 288. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 29
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 147401496
- Full Text :
- https://doi.org/10.1109/JMEMS.2020.3026167