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X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications.

Authors :
Kochhar, Abhay
Mahmoud, Ashraf
Shen, Yuyi
Turumella, Nihar
Piazza, Gianluca
Source :
Journal of Microelectromechanical Systems. Dec2020, Vol. 29 Issue 6, p1464-1472. 9p.
Publication Year :
2020

Abstract

This article reports Lithium Niobate (LN) based shear horizontal (SH0) resonators utilizing suspended and solidly mounted structures for radio frequency (RF) applications. The solidly mounted SH0 structure (also termed guided SH0 structure) is advantageous in obtaining reduced temperature coefficient of frequency (TCF), reduced high frequency overtone spurious responses, and improved power handling. The demonstrated solidly mounted guided SH0 resonators exhibit a mechanical Q as high as 1316 around 950 MHz, and electromechanical coupling factor (${k} _{\mathrm {t}}^{\mathrm {2}}$) of around 21.8 % - resulting in a figure of merit ($\mathrm {FoM}=k_{\mathrm {t}}^{\mathrm {2}}\cdot \mathrm {Q}$) of 288. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
10577157
Volume :
29
Issue :
6
Database :
Academic Search Index
Journal :
Journal of Microelectromechanical Systems
Publication Type :
Academic Journal
Accession number :
147401496
Full Text :
https://doi.org/10.1109/JMEMS.2020.3026167