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Calculation of the Ga+ FIB Ion Dose Distribution by SEM Image.

Authors :
Mitrofanov, M. I.
Voznyuk, G. V.
Rodin, S. N.
Lundin, W. V.
Evtikhiev, V. P.
Tsatsulnikov, A. F.
Kaliteevski, M. A.
Source :
Semiconductors. 2020, Vol. 54 Issue 12, p1682-1684. 3p.
Publication Year :
2020

Abstract

A new approach for calculating the ion dose spatial distribution of the focused ion beam is proposed. The approach is based on the analysis of the secondary electron microscopy image of the area irradiated by the focused ion beam. [ABSTRACT FROM AUTHOR]

Subjects

Subjects :
*FOCUSED ion beams
*SCANNING electron microscopy
*IONS
*ELECTRON microscopy
*ION bombardment

Details

Language :
English
ISSN :
10637826
Volume :
54
Issue :
12
Database :
Academic Search Index
Journal :
Semiconductors
Publication Type :
Academic Journal
Accession number :
147387392
Full Text :
https://doi.org/10.1134/S1063782620120246
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