Design Optimization Techniques in Nanosheet Transistor for RF Applications.

Nanosheet gate-all-around transistors are analyzed for RF applications using calibrated TCAD simulations. The effects of stack spacing and number of stacks on device performance are studied and a substack design for improved RF performance is proposed. The novel substack design can improve cut-off frequency (Ft) by ~10% and minimum number of substacks and minimum substack spacing should be used. [ABSTRACT FROM AUTHOR]