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Perturbation Analysis of Nonlinearity in Radio-Frequency Bulk Acoustic Wave Resonators Using the Mass–Spring Model.
- Source :
-
IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control . Jul2020, Vol. 67 Issue 7, p1479-1484. 6p. - Publication Year :
- 2020
-
Abstract
- This article describes derivation of an equivalent circuit for nonlinear responses in film bulk acoustic resonators from the first-order perturbation analysis using the piezoelectric constitutive equations with the ${h}$ -form. For simplicity, electrodes and piezoelectric layers are considered as mass and spring, respectively, in the derivation. Then, it is demonstrated that the second- and third-order harmonic responses can be simulated well by the circuit. In addition, nonlinearity in the Si substrate is also taken into account and its impact is discussed. It is also discussed how the frequency dependences vary with the nonlinearity mechanisms as a finding from the derived equivalent circuit. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 08853010
- Volume :
- 67
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control
- Publication Type :
- Academic Journal
- Accession number :
- 144376145
- Full Text :
- https://doi.org/10.1109/TUFFC.2020.2969165