An accurate inner diameter measurement.

The inaccurate deflection behavior of the probing system degrades the performance of the diameter-measuring machines. In this experiment, the probing is improved, applying an autocollimator and an angular positioning datum. We have devised this datum using a liquid wedge. A ring gauge is chosen as a workpiece to evaluate the deflection behavior of the probing system. The improved uncertainty of the probing is found as low as 40 nm. Subsequently, the inner diameter of the ring gauge is measured on this experimental setup. By employing a simulation, we aligned the workpiece. The deflections of the stylus are optimized to achieve zero deflection error at the zenith points. Consequently, the swing of the probe at the zenith points is combined with the rectilinear displacement of the workpiece to estimate the inner diameter. The uncertainty of the measurement of the ring gauge is improved up to 140 nm. [ABSTRACT FROM AUTHOR]