Monatomic hydrogen diffusion in β-Ga2O3.

The nature of hydrogen migration in β-Ga2O3 was investigated with respect to molecular or monatomic diffusion. For this purpose, β-Ga2O3 samples were grown by plasma-assisted pulsed laser deposition in which H and D were spatially separated. The samples were characterized using secondary-ion-mass spectrometry and hydrogen effusion measurements. The combination of these methods provides clear evidence for monatomic H and D diffusion in β-Ga2O3. [ABSTRACT FROM AUTHOR]