Non-linear mechanics in resonant inertial micro sensors.

Microsystems (or Micro Electro Mechanical Systems, MEMS) are important components of many popular products in the consumer market and are one of the enabling ingredients of incoming industrial revolutions like Industry 4.0 and Internet of Things (IoT). Behind many Microsystems there are important mechanical principles and coupling effects that must be completely mastered starting from the design phase. More sophisticated and smaller devices also imply to consider many non-linear effects that can be strictly related to the mechanical response or to coupled electro-thermo-mechanical phenomena. This paper contains an overview of key mechanical aspects in design and reliability of Microsystems with a particular focus on non-linear dynamics of oscillators in inertial sensors. • State of the art on non-linear mechanical phenomena in microsystems. • Focus of the paper on resonant inertial micro sensors. • Various examples on non-linearities in real cases. • Discussion on future research directions. [ABSTRACT FROM AUTHOR]