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Fabrication of SU-8 photoresist micro–nanofluidic chips by thermal imprinting and thermal bonding.
- Source :
-
Microsystem Technologies . Mar2020, Vol. 26 Issue 3, p861-866. 6p. - Publication Year :
- 2020
-
Abstract
- Micro–nanofluidic chips have been widely applied in biological and medical fields. In this paper, a simple and low-cost fabrication method for micro–nano fluidic chips is proposed. The nano-channels are fabricated by thermal nano-imprinting on an SU-8 photoresist layer followed by thermal bonding with a second SU-8 photoresist layer. The micro-channels are produced on the second layer by UV exposure and then thermal bonded by a third layer of SU-8 photoresist. The final micro–nano fluidic chip consists of micro-channels (width of 200.0 ± 0.1 μm and, depth of 8.0 ± 0.1 μm) connected by nano-channels (width of 533 ± 6 nm and, depth of 372 ± 6 nm), which has great potential in molecular filtering and detection. [ABSTRACT FROM AUTHOR]
- Subjects :
- *PHOTORESISTS
*NANOFLUIDICS
*FILTERS & filtration
Subjects
Details
- Language :
- English
- ISSN :
- 09467076
- Volume :
- 26
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- Microsystem Technologies
- Publication Type :
- Academic Journal
- Accession number :
- 141728305
- Full Text :
- https://doi.org/10.1007/s00542-019-04565-2